Piezoelektrik Tahrikli Doğrusal Hareket Mekanizma Tasarımı

Abstract

This thesis aims to design a linear motor which can move at nanometer range. The linear motor that is made up of piezoelectrical materials works according to the principal of slip-stick. This thesis examines performance of motors against supply voltage of the piezoelectrics, temperature and mechanical load. In this research two different mechanical slip-stick motors are studied.