RF Magnetron Kopartma İle Büyütülen V2O5 İnce Filmlerin Optik ve Elektrokromik Özelliklerinin İncelenmesi

Abstract

In this master's thesis study, V2O5 thin films were prepared using V2O5 target material by RF magnetron sputter method and the effects of film growth parameters on the optical and electrochromic properties of the films were investigated. The properties of thin films vary depending on growth parameters such as temperature, growth time, gas partial and total pressure. In this study, the effects of oxygen percentage in total pressure on the properties of V2O5 thin films were investigated. Optical transmittance and optical reflectance of grown V2O5 thin films and absorbance measurements of colored and transparent forms were taken and optical modulations were calculated. Electrochromic properties of the films were investigated by cyclic voltammetry (CV), chronoamperometry (CA) and chronocoulometry (CC) measurements. Coloration efficiencies of V2O5 thin films were calculated using CV curves, charges in anodic and cathodic colorations were calculated using CA curves, and ion storage efficiencies of grown V2O5 thin films were calculated using CC curves.