Corrigendum To “Process Optimization Of Parameterized Single Shot Method For A Rapid Production Of Photon Sireve With Direct Write Lithography” Microelectronic Engineering, Volume 209, 15 March 2019, Pages 41–48 (Microelectronic Engineering (2019) 209 (41–48), (S0167931719300607), (10.1016/J.Mee.2019.03.014))

Abstract

The authors regret the mistake in our publication title. The word “sireve” in the title is actually “sieve”. Incorrect title: Process optimization of parameterized single shot method for a rapid production of photon sireve with direct write lithography. Correct title: Process optimization of parameterized single shot method for a rapid production of photon sieve with direct write lithography. The authors would like to apologise for any inconvenience caused. © 2019 Elsevier B.V.