Elmas Benzeri Karbon İnce Filmlerin Hazırlanması ve Karakterizasyonu

Abstract

Diamond like carbon (DLC) thin films were deposited on glass substrates using reactive DC magnetron sputtering technique. The optical, structural and surface characterization of the films were performed to investigate the relationship between optical and bonding properties. In line with the objective, the effects of different deposition parameters such as substrate temperature (Ts), argon pressure (PAr), the ratio of hydrogen partial pressure to the total gas pressure PH2 (PH2+PAr), and negative substrate bias voltage (Vnb) on the properties of DLC films were studied in detail. The wavelength dependancy of optical constants and thickness of the films were obtained by simultaneous fitting of the optical transmission and reflection spectra using four different optical models, namely Cauchy Absorbent Model, Three Harmonic Oscillator Model, Tauc-Lorentz Model, and Forouhi-Bloomer Model. sp2 sp3 ratio of the films prepared at different working pressures were analyzed using XPS to investigate their bonding properties.